BRUCE TECHNOLOGIES HORIZONTAL DIFFUSION FURNACES

The industry leader in 300mm horizontal diffusion furnaces. Hundreds of 300mm, 200mm and 150mm diffusion furnaces installed worldwide. The expert source for new furnaces, upgrades, automation, support and parts.

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BDF 300 - 300MM HORIZONTAL FURNACE

The BDF-300 is the market share leader in 300mm horizontal diffusion furnaces. This 3 stack system is being used by the industry’s top discrete device manufacturers.

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S300 FURNACE AUTOMATION

Safely load and unload furnace boats to all cantilevers on the furnace stack. Maximize operator safety while minimizing wafer breakage – fully upgradeable.

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BDF 41 - BRUCE DIFFUSION FURNACE

The BDF-41 is a four stack horizontal furnace for up to and including 200mm wafers. With hundreds of installations worldwide, the BDF-41 is known for its thermal control and reliability.

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BDF 200 - BRUCE DIFFUSION FURNACE

The BDF-200 horiztonal diffusion furnace was designed to process 200mm wafers. The BDF-200 is the favorite workhorse of the analog semiconductor industry.

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APEX & Controls

Fully automate wafer processing using the APEX supervisory system.

HEATING ELEMENTS

Get replacement elements for any Bruce Diffusion Furnace from the furnace experts.

PARTS, REPAIR & SUPPORT

Upgrades, parts, field service, and technical support – keep your Bruce Furnace going,

The all new 7360 DDC Controller

All 7355x pcb’s have been combined onto a single board that handles the all functionality of the old controller. This new tube independent controller simplifies furnace troubleshooting, slashing furnace downtime.

7360 DDC Features & Screen Shots

Horizontal Furnace Automation

The S-300 automated multiple boat horizontal furnace cantilever loading system is a low cost system designed to assist the fab operator in safely loading and unloading wafer boats to all cantilevers on a furnace stack.

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