Wafer Transfer Machines

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R2D Automation
Comet series of state-of-the-art systems open new paths of innovation applied to wafer handling and storing. Throughout the world, our service centers provide today’s best automation tools to the semiconductor industry from diffusion/wet to packaging process and photovoltaic applications. Welcome into the world of Comet.

Comet 4 station wet

8″ transfer: 25/50 to 50 or 13/12 to 25

Comet 4 station wet system is a friendly, clean, reliable and robust Mass Wafer Transfer system. Customized for your different boats and carriers. Fully automatic, Comet 4 Station can be integrated inside a WET bench. Comet 4 station allows transfer 2×25 wafers from transport cassettes to a 50 position process boat. Compatible with your communication requirements and other manufacturer’s processing equipment.
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Comet MLT transfer

Automatic transfer: 1 to 200 wafers –> 150 or 200mm transfer –> Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation. The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling. Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
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Comet Gemini monostation transfer system

Automatic transfer: 1 to 200 wafers –> 150 or 200mm transfer –> Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation. The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling. Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
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Comet monostation

Automatic transfer: 1 to 200 wafers –> 150 or 200mm transfer –> Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation. The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling. Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
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Comet 2 station

Automatic transfer: 1 to 200 wafers –> 150 or 200mm transfer –> Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation. The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling. Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
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Comet 2 station back to back

Automatic transfer: 1 to 200 wafers –> 150 or 200mm transfer –> Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation. The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling. Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
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Comet 2 station pitch changing

Automatic transfer: 1 to 200 wafers –> 150 or 200mm transfer –> Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation. The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling. Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
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Comet 3 station

Automatic transfer: Transfer 25 to 25–> 25/25 to 50 or 12/13 to 25 –> From 3″ carrier to 8″ carrier

The Comet 3 station is the Operator’s favorite Mass Wafer Transfer System.
This Comet is fast, clean, reliable and accurate. Customized for your different boats and carriers. Compatible with your communication requirements and other manufacturer’s processing equipment. Integrated Infrared Heat Sensor Simple to use and easy to maintain.
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Comet 3 station back to back

Automatic transfer: Transfer 25 to 25–> From 3″ to 8″–> Proximity / Same Slot / Boron Nitride

Using Comet 3 station BTB is the easiest way to transfer 25 wafers face to face (or back to back). Proximity or same slot process. The best mass transfer system for a safe back to back transfer. Adapted for Solid Source,WET or LTO process.
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Comet PTP (pod to pod) transfer system

Transfers 200mm: 25 to 25–> POD to POD or POD to open cassette –> Through the wall (CMP/clean room)

This Comet System transfers automatically 25 wafers from one POD to another POD or from one POD to an open cassette. Customized for your different application the PTP can be the link between 2 different classes area (CMP to clean room and back)
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