Heating Elements

High Temperature Elements

Heater design consisting an interlocking spacer design to reduce the heater wire sag at very high temperatures >1250˚C.

  • 150mm (BDF41): 10.5” ID, 16” OD, 70” long.
  • 150/200mm (BDF41):  11.25” ID, 16.25” OD, 71” long.
  • 200mm (BDF200):  12.5” ID, 18” OD, 71” long.
  • Guaranteed Maximum Ramp Rate:
    • 15°C from 600°C to 1050°C
    • 10°C from 1050°C to 1150°C
    • 5°C from 1150°C to Max temp.
  • 1 Meter Flat Zone
  • 5 Zone Temp Control
  • Net Power 32.2 – 41.3KW
  • Kanthal APM wire
  • 1325˚ – 1350˚C Maximum Temperature

Low Mass, Fast React Elements

Designed consisting of light gauge low mass wiring and reduced insulation to accelerate ramping and cooling for CVD and Low temperature processes up to 900˚C.  This core replaces the existing Bruce 2962079 CVD heating element.

  • 150mm (ph 9652625) 11.7” ID, 16” OD, 70” long, 38” flat zone
  • Target Ramp rate  25˚ C/min
  • Target Cool down rate
    • 10˚ C/min 900˚C to 600˚C
    • 7˚ C/min 600˚C to 400˚C
    • 5˚ C/min below 400˚C
  • 1 Meter Flat Zone
  • 5 Zone Temp Control
  • Net Power 32.4KW
  • Kanthal A1 wire
  • 900˚C Maximum Temperature

Bruce Technologies Inc. manufactured all the Heating Elements for the Apogee Vertical Furnace.  Bruce continues to provide these elements for the existing Apogee installation base.

Vertical (Apogee, 5 Zone) Elements

Bruce Technologies Inc. designed and manufactured all the Heating Elements for the Apogee Vertical Furnace.  Bruce continues to provide these elements for the existing Apogee installation base.

Pre-Oxidation Elements

Bruce offers the capability to pre-oxidize high temp elements for customers in order to save them from the lengthy time and odor within the fab.

Any of our elements can be requested for this process, please request upon ordering.