Boatloaders, Heat Shields and Auto-Doors
Bruce maintains support for the older Bruce boatloaders (7670s and 7680s), the Amtech Systems boatloaders (IBAL and current models) and continues the ability to integrate their mechanical loaders into the controls of other OEM.SECSII/GEM (option):Auto-doors simply designed to prevent heat from the process tube from affecting the hardware or electronics. Integrates into boatloader controls of Bruce Technologies and other furnace OEMs.
Process Door Closures: Auto door closure designed for specific process requirements such as POCL3 and other CVD processes.
Over the past 20 years, the Atmoscan is a closed cantilever system used in production with over 1000 units installed worldwide. The Atmoscan’s first use was to exclude O2 from the wafer environment during the push/pull portions of the thermal cycle. This was critical in limiting native or uncontrolled oxidations during load insertion and to stabilize surface states (Qss) upon withdrawal from the furnace.
In it’s era, the Atmoscan was enabling technology for many applications. As more Atmoscans were installed, other advantages became apparent, such as better temperature uniformity (particularly during push/pull), higher throughput due to higher push/pull temperatures, and larger load sizes.