BDF 41 – 1993 Vintage (DBTB-2)

OEM “As-Is”; Installation Ready; Inspection Report Provided and 90-day warranty on all controls.

DBTB-2 (DIRE-10)

  • Tube #1: Oxide (1250°C Max) (O2, H2, N2)
  • Tube #2: Oxide (1250°C Max) (O2, H2, N2)
  • Tube #3: Flat-Poly  (1000°C Max) (N2, O2, SiH4, PH3, N2)
  • Tube #4: Flat-Poly (Plumbed for BPSG; (1000°C Max (N2, O2, SiH4, PH3, BCL3, N2)

Source:

  • Fab:  International Rectifier
  • Original Year Shipped:  1993
  • Incoming Condition:  Good

Configuration:

  • APEX System: (added)
  • Refurbished C3600
  • Recipe Management, Process Data Captures, Maintenance. & SPC
  • 7355X & Single I/O
  • 7680 Boat Loader Controls
  • 7680 Boat Loaders
  • Diamonds Saddles (1.5” round shaft)
  • SiC Paddles (Not Included)
  • 43 KvA Transformers
  • Element: Used / Good Condition
  • Heat Exchanger: Aged; Functional; Leak Checks OK
  • Scavenger: Aged; Functional
  • Spike TC’s: provided but mostly broken (profile TC not provided)
  • MFC: Units 2020 & 1100
  • Replaced UPS for 24 volts on controls
  • External Torches (removed obsolete/unsafe)
  • Bubblers (obsolete/removed/not provided)
  • No CVD pumps/heat jackets available

Source Inspection Results:

  • Boat Loader: Bearings Need Replaced
  • Temperature/Elements: Trigger Boards / SCR packs need trouble shooting
  • Power Systems: Main Breaker needs replacing (functional but safety feature fails)
  • Gases / Plumbing: T1: 30slm N2 MFC; T2: No Issues; T3: 500slm O2 MFC, BCL3 is Capped at Manifold; T4: 200slm SiH4 MFC, BCL3 is Capped at Manifold

Documents Provided:

  • Manuals: Provided
  • Inspection Results: Provided
  • Original Install Drawing: Provided

Options:

  • 200mm Capable: Ready with change in elements, tube supports & door closures
  • Torch Capable: Yes
  • Bubbler Capable: Yes

Contact Person:

  • Phillip Hankins, General Manager
  • 18 Esquire Road, Billerica, MA 01862
  • (m) 602-502-8864
  • (e) phankins@brucetechnologiesinc.com