Controls and APEX

APEX Supervisory Systemcontrols_apex

APEX is a software application that provides a set of tools for automating wafer processing.

  • Recipe Managemen
  •  Real Time Tube Status
  • Data Collection
  • Preventive Maintenance Management
  • Statistical Process Control (optional)
  • Host Link Interface (optional)
  • APEX Systems
  • HP B2600 or C3600 Workstations
  • HP-UX 10.20 Operating System
  • Borland Interbase Database Management System
  • Digi Etherlite Remote Multiplexer
  • HP Printer/Plotter (PCL-5 / HPGL)

APEX Communications

  • Digi Etherlite Terminal Server
  • Serial to TCP/IP Protocol over Network
  • RS232 Serial Communication to Controller
  • HSMS Direct Network Connection to Factory Host (optional)
  • 10/100 BASE-T Ethernet utilizing TCP/IP across private network.

(One APEX node controls up to 16 process tubes)